
Upgrade and improvement of the flattening quality of DMs (Kilo-C DMs from Boston Micromachines) with a ZYGO Verifire interferometer installed on the SPEED bench.

Upgrade and improvement of the flattening quality of DMs (Kilo-C DMs from Boston Micromachines) with a ZYGO Verifire interferometer installed on the SPEED bench.
UMR LAGRANGE
Observatoire de la Côte d’Azur 
Boulevard de l’Observatoire
CS 34229 - F 06304 NICE Cedex 4
Tél. : +33 (0)4 92 00 30 11 
 Fax : +33 (0)4 92 00 30 33